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产品型号 尺寸 厚度 有效区域 正方形宽度 光罩类型 基质 分类 等级 证书 兼容远心镜头
(W x H) (Wa x Ha) (Ws) (part number ending in)
(mm x mm) (mm) (mm x mm) (mm) (mm) (mm)
1 1 2
PT004-009 33 x 26 3 15 x 13 0.20 Chrome-on-glass Soda lime glass 1 - No 004, 007, 009
购买
PT016-024 33 x 26 3 31 x 24 0.60 Chrome-on-glass Soda lime glass 1 - No 016, 024
购买
PT036-056 66 x 52 3 64 x 51 1.35 Chrome-on-glass Soda lime glass 1 - No 036, 048, 056
购买
PT064-096 107 x 83 3 105 x 79 2.20 Chrome-on-glass Soda lime glass 1 - No 064, 072, 080, 085, 096
购买
PT120-144 180 x 140 3 168 x 132 3.00 Chrome-on-glass Soda lime glass 2 - No 110, 120, 130, 144
购买
PT192-240 300 x 240 3 260 x 200 4.00 Chrome-on-glass Soda lime glass - B No 192, 200, 240
购买
PT260-310 340 x 280 3 320 x 260 5.00 Chrome-on-glass Soda lime glass - B No 308
购买
PT004-009-C 33 x 26 3 15 x 13 0.20 Chrome-on-glass Soda lime glass 2 - Yes 004, 007, 009
购买
PT016-024-C 33 x 26 3 31 x 24 0.60 Chrome-on-glass Soda lime glass 2 - Yes 016, 024
购买
PT036-056-C 66 x 52 3 64 x 51 1.35 Chrome-on-glass Soda lime glass 2 - Yes 036, 048, 056
购买
PT064-096-C 107 x 83 3 105 x 79 2.20 Chrome-on-glass Soda lime glass 2 - Yes 064, 072, 080, 085, 096
购买
PT120-144-C 180 x 140 3 168 x 132 3.00 Chrome-on-glass Soda lime glass 2 - Yes 110, 120, 130, 144
购买
PT192-240-C 300 x 240 3 260 x 200 4.00 Chrome-on-glass Soda lime glass - B Yes 192, 200, 240
购买
PT260-310-C 340 x 280 3 320 x 260 5.00 Chrome-on-glass Soda lime glass - B Yes 308
购买
PT064-096-P 107 x 83 3 105 x 79 2.20 Film-on-glass Soda lime glass - 4 No 064, 072, 080, 085, 096
购买
PT120-144-P 180 x 140 3 168 x 132 3.00 Film-on-glass Soda lime glass - 4 No 110, 120, 130, 144
购买
PT192-240-P 300 x 240 3 260 x 200 4.00 Film-on-glass Soda lime glass - 4 No 192, 200, 240
购买
PT260-310-P 340 x 280 3 320 x 260 5.00 Film-on-glass Soda lime glass - 4 No 308
购买
PTCP-S1-HR1-C 180 x 140 3 167.4 x 129.6 1.35 Chrome-on-glass Soda lime glass 2 - Yes TCCP12144, TCCP23144, TCCP3MHR144, TCCP5MHR144
购买
PTCP-M1-LR1-C 245 x 196 3 237.6 x 184.8 2.20 Chrome-on-glass Soda lime glass - B Yes TCCP12192, TCCP23192
购买
PTCP-M1-HR1-C 245 x 196 3 237.6 x 189.0 1.35 Chrome-on-glass Soda lime glass - B Yes TCCP3MHR192, TCCP5MHR192
购买
PTCP-L1-LR1-C 300 x 240 3 281.6 x 228.8 2.20 Chrome-on-glass Soda lime glass - B Yes TCCP12260, TCCP23260
购买
PTCP-L1-HR1-C 300 x 240 3 286.2 x 226.8 1.35 Chrome-on-glass Soda lime glass - B Yes TCCP3MHR260, TCCP5MHR260
购买
PTCP-S1-HR1-P 180 x 140 3 167.4 x 129.6 1.35 Film-on-glass Soda lime glass - 4 No TCCP12144, TCCP23144, TCCP3MHR144, TCCP5MHR144
购买
PTCP-M1-LR1-P 245 x 196 3 237.6 x 184.8 2.20 Film-on-glass Soda lime glass - 4 No TCCP12192, TCCP23192
购买
PTCP-M1-HR1-P 245 x 196 3 237.6 x 189.0 1.35 Film-on-glass Soda lime glass - 4 No TCCP3MHR192, TCCP5MHR192
购买
PTCP-L1-LR1-P 300 x 240 3 281.6 x 228.8 2.20 Film-on-glass Soda lime glass - 4 No TCCP12260, TCCP23260
购买
PTCP-L1-HR1-P 300 x 240 3 286.2 x 226.8 1.35 Film-on-glass Soda lime glass - 4 No TCCP3MHR260, TCCP5MHR260
购买

最后更新: 28 9月 2022

展开表格

注释

  1. Film-on-glass photomask 的分类公式与普通 chrome-on-glass 不同,规格见下页表格。
  2. 下载 CoC 格式模式传真

技术文档

Product user guide
CoC Format

可以通过以下方法计算图案特征的尺寸公差:

`Maßtoleranz = ± (A + B * C)`

长度超过10mm的2级图案尺寸公差示例

Dimensional Tolerance = ± 0.0016mm + (±0.000008mm x 10 mm) = ± 0.00168 mm

For Chrome-on-glass Photomask
ClassMin feature dimensions; Min spacing(µm)Positioning error (µm)Speed factor (µm/mm)
11.46.40.016
20.81.60.008
30.40.60.004
40.20.20.001
展开表格
For Film-on-glass Photomask
GradeMin feature dimensions; Min spacing(µm)Positioning error (µm)Speed factor (µm/mm)
19.69.60.015
24.89.60.015
32.49.60.015
41.29.60.015
展开表格