	Compatibility		Mechanical specifications
Part number	Compatible telecentric lenses	Compatible CMPH pattern mounts	Dimensions width × height	Thickness	Active area width × height	Squares width	Photomask type	Class	Grade	Certificate
	Part numbers ending in		(mm × mm)	(mm)	(mm × mm)	(mm)
								1		2
PT004-009校准标定板	004, 007 and 009	CMPH 004-024	33 x 26	3	15 x 13	0.20	Chrome-on-glass	1	-	No	购买
PT016-024校准标定板	016, 024	CMPH 004-024	33 x 26	3	31 x 24	0.60	Chrome-on-glass	1	-	No	购买
PT036-056校准标定板	036, 048 and 056	CMPH 036-056	66 x 52	3	64 x 51	1.35	Chrome-on-glass	1	-	No	购买
PT064-096校准标定板	064, 072, 080, 085 and 096	CMPH064-096, CMTS064-096	107 x 83	3	105 x 79	2.20	Chrome-on-glass	1	-	No	购买
PT120-144远心镜头校准标定板	110, 120, 130 and 144	-	180 x 140	3	170 x 140	3.00	Chrome-on-glass	2	-	No	购买
PT192-240远心镜头校准标定板	192, 200, 240	-	300 x 240	3	260 x 200	4.00	Chrome-on-glass	2	-	No	购买
PT260-310远心镜头校准标定板	-	-	340 x 280	3	320 x 260	5.00	Chrome-on-glass	2	-	No	购买
PT004-009-C有证书的远心镜头校准标定板	004, 007 and 009	CMPH 004-024	33 x 26	3	15 x 13	0.20	Chrome-on-glass	2	-	Yes	购买
PT016-024-C有证书的远心镜头校准标定板	016, 024	CMPH 004-024	33 x 26	3	31 x 24	0.60	Chrome-on-glass	2	-	Yes	购买
PT036-056-C有证书的远心镜头校准标定板	036, 048 and 056	CMPH 036-056	66 x 52	3	64 x 51	1.35	Chrome-on-glass	2	-	Yes	购买
PT064-096-C有证书的远心镜头校准标定板	064, 072, 080, 085 and 096	CMPH064-096, CMTS064-096	107 x 83	3	105 x 79	2.20	Chrome-on-glass	2	-	Yes	购买
PT120-144-C有证书的远心镜头校准标定板	110, 120, 130 and 144	-	180 x 140	3	170 x 140	3.00	Chrome-on-glass	2	-	Yes	购买
PT192-240-C有证书的远心镜头校准标定板	192, 200, 240	-	300 x 240	3	260 x 200	4.00	Chrome-on-glass	2	-	Yes	购买
PT260-310-C有证书的远心镜头校准标定板	-	-	340 x 280	3	320 x 260	5.00	Chrome-on-glass	2	-	Yes	购买
PT004-009-P具有镀膜的远心镜头校准标定板，尺寸 33 x 26 mm x mm，正方形0.2 mm	004, 007 and 009	CMPH 004-024	33 x 26	3	15 x 13	0.20	Emulsion-on-glass	-	4	No	购买
PT016-024-P具有镀膜的远心镜头校准标定板，尺寸 33 x 26 mm x mm，正方形0.6mm	016, 024	CMPH 004-024	33 x 26	3	31 x 24	0.60	Emulsion-on-glass	-	4	No	购买
PT036-056-P具有镀膜的远心镜头校准标定板，尺寸 66 x 52mm x mm，正方形1.35mm	036, 048 and 056	CMPH 036-056	66 x 52	3	64 x 51	1.35	Emulsion-on-glass	-	4	No	购买
PT064-096-P具有镀膜的远心镜头校准标定板，尺寸 107 x 83mm x mm，正方形2.2mm	064, 072, 080, 085 and 096	CMPH064-096, CMTS064-096	107 x 83	3	105 x 79	2.20	Emulsion-on-glass	-	4	No	购买
PT120-144-P具有镀膜的远心镜头校准标定板，尺寸 180 x 140mm x mm，正方形3mm	110, 120, 130 and 144	-	180 x 140	3	170 x 140	3.00	Emulsion-on-glass	-	4	No	购买
PT192-240-P具有镀膜的远心镜头校准标定板，尺寸 300 x 240mm x mm，正方形4mm	192, 200, 240	-	300 x 240	3	260 x 200	4.00	Emulsion-on-glass	-	4	No	购买
PT260-310-P具有镀膜的远心镜头校准标定板，尺寸340 x 280mm x mm，正方形5mm	-	-	340 x 280	3	320 x 260	5.00	Emulsion-on-glass	-	4	No	购买
PTCP-S1-HR1-C有证书的远心镜头校准标定板	TCCP12144, TCCP23144, TCCP3MHR144, TCCP5MHR144	-	180 x 140	3	167.4 x 129.6	1.35	Chrome-on-glass	2	-	Yes	购买
PTCP-M1-LR1-C有证书的远心镜头校准标定板	TCCP12192, TCCP23192	-	245 x 196	3	237.6 x 184.8	2.20	Chrome-on-glass	2	-	Yes	购买
PTCP-M1-HR1-C有证书的远心镜头校准标定板	TCCP3MHR192, TCCP5MHR192	-	245 x 196	3	237.6 x 189	1.35	Chrome-on-glass	2	-	Yes	购买
PTCP-L1-LR1-C具有镀膜和证书的远心镜头校准标定板，尺寸300 x 240 mm x mm，正方形2,2 mm	TCCP12260, TCCP23260	-	300 x 240	3	281.6 x 228.8	2.20	Chrome-on-glass	2	-	Yes	购买
PTCP-L1-HR1-C具有镀膜和证书的远心镜头校准标定板，尺寸300 x 240 mm x mm，正方形1.35 mm	TCCP3MHR260, TCCP5MHR260	-	300 x 240	3	286.2 x 226.8	1.35	Chrome-on-glass	2	-	Yes	购买
PTCP-S1-HR1-P具有镀膜的远心镜头校准标定板，尺寸300 x 240 mm x mm，正方形1.35 mm	TCCP12144, TCCP23144, TCCP3MHR144, TCCP5MHR144	-	180 x 140	3	167.4 x 129.6	1.35	Emulsion-on-glass	-	4	No	购买
PTCP-M1-LR1-P具有镀膜的远心镜头校准标定板，尺寸 245 x 195 mm x mm，正方形2.2 mm	TCCP12192, TCCP23192	-	245 x 195	3	237.6 x 184.8	2.20	Emulsion-on-glass	-	4	No	购买
PTCP-M1-HR1-P具有镀膜的远心镜头校准标定板，尺寸 245 x 195 mm x mm，正方形1.35 mm	TCCP3MHR192, TCCP5MHR192	-	245 x 195	3	237.6 x 189	1.35	Emulsion-on-glass	-	4	No	购买
PTCP-L1-LR1-P具有镀膜的远心镜头校准标定板，尺寸 300 x 240 mm x mm，正方形2.2 mm	TCCP12260, TCCP23260	-	300 x 240	3	281.6 x 228.8	2.20	Emulsion-on-glass	-	4	No	购买
PTCP-L1-HR1-P具有镀膜的远心镜头校准标定板，尺寸 300 x 240 mm x mm，正方形1.35 mm	TCCP3MHR260, TCCP5MHR260	-	300 x 240	3	286.2 x 226.8	1.35	Emulsion-on-glass	-	4	No	购买

最后更新: 2020-12-07

注释

Class number (2*) for Emulsion-on-glass photomasks differs from usual Chrome-on-glass. Specifications are in the tech info section.
Download CoC Format Pattern facsimile

技术文档

数据表 (最后更新::2020-12-07)

XLS

CoC Format Pattern 2019

兼容产品

TC telecentric lens for matrix detectors

TC 系列

双远心镜头,最大支持 2/3" 面阵探测器

LTCLHP 系列

高性能远心照明器

TCBENCH telecentric optical assembly for machine vision applications

TCBENCH 系列

易于测量的TC远心光学试验台套件

CMPH 系列

标定板支架

另请参见

PTPR 系列

可以通过以下方法计算图案特征的尺寸公差：

Dimensional Tolerance = ± (A + B * C)

A = Positioning error

B = Speed factor

C = Dimension of interest

长度超过10mm的2级图案尺寸公差示例

Dimensional Tolerance = ± 0.0016mm + (±0.000008mm x 10 mm) = ± 0.00168 mm

For Chrome-on-glass Photomask
Class	Min feature dimensions; Min spacing(µm)	Positioning error (µm)	Speed factor (µm/mm)
1	1.4	6.4	0.016
2	0.8	1.6	0.008
3	0.4	0.6	0.004
4	0.2	0.2	0.001

For Emulsion-on-glass Photomask

Class 1:
This represents a resolution that is equivalent to approximately 64k dpi. Although this resolution may resolve smaller features, we recommend keeping feature sizes above 10µm as corner rounding is considerable. Edge sharpness and definition is acceptable for non critical design types, although designs with arcs/circles and lines running off 90 degree grid may show pixelation. NO features such as lines / circles / spots / squares below 10 µm.
Class 2:
This represents a resolution that is equivalent to 128k dpi. This resolution will resolve down to 4µm lines and has good line edge qualities with only a small pixelation along edges. Corner rounding is below 3µm but still visible. NO features such as lines / circles / spots / squares below 4µm.
Class 3:
This represents our most common resolution for demanding, high precision photomasks. It is equivalent to 256k dpi , and offers an excellent price / quality balance. This resolution will resolve down to 2µm lines and has very good line edge qualities with no pixelation along edges, and corner rounding is kept to a minimum.

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